Surface Characterization and Interfacial Adhesion in MEMS Devices
نویسندگان
چکیده
منابع مشابه
Micromechanical characterization of ALD thin films
Aalto University, P.O. Box 11000, FI-00076 Aalto www.aalto.fi Author Maria Berdova Name of the doctoral dissertation Micromechanical characterization of ALD thin films Publisher School of Chemical Technology Unit Materials Science and Engineering Series Aalto University publication series DOCTORAL DISSERTATIONS 119/2015 Field of research Microelectromechanical systems Manuscript submitted 31 Au...
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